Studies of thin films of Ti- Zr -V as non-evaporable getter films prepared by RF sputtering

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dc.contributor.authorGupta, N.
dc.contributor.authorJagannath
dc.contributor.authorSharma, R. K.
dc.contributor.authorGadkari, S. C.
dc.contributor.authorMuthe, K. P.
dc.contributor.authorMukundhan, R.
dc.contributor.authorGupta, S. K.
dc.date.accessioned2014-04-07T08:52:49Z
dc.date.available2014-04-07T08:52:49Z
dc.date.issued2013
dc.description.divisionTPDen
dc.format.extent4160 bytes
dc.format.mimetypetext/html
dc.identifier.sourceAIP Conference Proceedings, 2013. Vol. 1512 (1): pp. 794-795en
dc.identifier.urihttp://hdl.handle.net/123456789/9021
dc.language.isoenen
dc.subjectthin films studyen
dc.subjectTi- Zr -Ven
dc.subjectnon-evaporable getter filmsen
dc.subjectRF sputteringen
dc.titleStudies of thin films of Ti- Zr -V as non-evaporable getter films prepared by RF sputteringen
dc.typeArticleen

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