Studies of thin films of Ti- Zr -V as non-evaporable getter films prepared by RF sputtering

No Thumbnail Available

Click here to download

1005.htm (4.06 KB)

Date

2013

Authors

Journal Title

Journal ISSN

Volume Title

Publisher

Abstract

Description

Keywords

thin films study, Ti- Zr -V, non-evaporable getter films, RF sputtering

Source

AIP Conference Proceedings, 2013. Vol. 1512 (1): pp. 794-795

URI

http://hdl.handle.net/123456789/9021

Collections

2013