In-depth analysis of impurities in HFCVD diamond thin films grown from acetone/hydrogen mixtures

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Date

2003

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Abstract

Description

Keywords

Diamond films, Hot filament chemical vapor deposition (HFCVD), Acetone–Hydrogen mixtures, Impurities, Secondary ion mass spectrometry (SIMS), Nuclear resonant reaction analysis (NRRA)

Source

Diamond and Related Materials, 2003. Vol. 12 (9): pp. 1569-1575

URI

http://hdl.handle.net/123456789/23312

Collections

2003