Study of reactive electron beam deposited tantalum penta oxide thin films with spectroscopic ellipsometry and atomic force microscopy

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Date

2023

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Keywords

Tantalum penta oxide thin films, Electron beam deposition, Spectroscopic ellipsometry, Atomic force microscopy, Grazing incidence X-ray reflectivity

Source

Applied Surface Science Advances, 2023. Vol. 18: Article no. 100480

URI

http://hdl.handle.net/123456789/27442

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2023