X-ray reflectivity study of bias graded diamond like carbon film synthesized by ECR plasma

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Date

2013

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Abstract

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Keywords

Diamond like carbon, electron cyclotron resonance, X-ray reflectivity, roughness, sub-plantation model, amorphous material

Source

Bulletin of Materials Science, 2013. Vol. 36 (1): pp. 9-14

URI

http://hdl.handle.net/123456789/9109

Collections

2013