Local crystal structure and mechanical properties of sputtered Ti-doped AlN thin films

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dc.contributor.authorPanda, P.
dc.contributor.authorKrishna, N. G.
dc.contributor.authorRajput, P.
dc.date.accessioned2019-09-06T08:50:24Z
dc.date.available2019-09-06T08:50:24Z
dc.date.issued2018
dc.description.divisionA&MPDen
dc.format.extent4701 bytes
dc.format.mimetypetext/html
dc.identifier.sourcePhysical Chemistry Chemical Physics, 2018. Vol. 20: pp. 29817-29825en
dc.identifier.urihttp://hdl.handle.net/123456789/19268
dc.language.isoenen
dc.subjectLocal crystal structureen
dc.subjectnano-mechanical propertyen
dc.subjectsputtered Ti-doped AlN thin filmsen
dc.subjectX-ray absorption spectroscopy (XAS)en
dc.titleLocal crystal structure and mechanical properties of sputtered Ti-doped AlN thin filmsen
dc.typeArticleen

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