Local crystal structure and mechanical properties of sputtered Ti-doped AlN thin films

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Date

2018

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Description

Keywords

Local crystal structure, nano-mechanical property, sputtered Ti-doped AlN thin films, X-ray absorption spectroscopy (XAS)

Source

Physical Chemistry Chemical Physics, 2018. Vol. 20: pp. 29817-29825

URI

http://hdl.handle.net/123456789/19268

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2018