Thin films of Ti—Nb—Zr as non-evaporable getter films

dc.contributor.authorSharma, R. K.
dc.contributor.authorJagannath
dc.contributor.authorBhattacharya, S.
dc.contributor.authorGadkari, S. C.
dc.contributor.authorMukund, R.
dc.contributor.authorGupta, S. K.
dc.date.accessioned2013-03-21T08:48:55Z
dc.date.available2013-03-21T08:48:55Z
dc.date.issued2012
dc.description.divisionTPDen
dc.format.extent4224 bytes
dc.format.mimetypetext/html
dc.identifier.sourceJournal of Physics-Conference Series, 2012. Vol. 390 (1): pp. 012041en
dc.identifier.urihttp://hdl.handle.net/123456789/7130
dc.language.isoenen
dc.subjectThin filmsen
dc.subjectTi—Nb—Zren
dc.subjectnon-evaporable getter filmsen
dc.subjectDC magnetron sputtering techniqueen
dc.titleThin films of Ti—Nb—Zr as non-evaporable getter filmsen
dc.typeArticleen

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