Thin films of Ti—Nb—Zr as non-evaporable getter films

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Date

2012

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Abstract

Description

Keywords

Thin films, Ti—Nb—Zr, non-evaporable getter films, DC magnetron sputtering technique

Source

Journal of Physics-Conference Series, 2012. Vol. 390 (1): pp. 012041

URI

http://hdl.handle.net/123456789/7130

Collections

2012