Role of substrate temperature in the pulsed laser deposition of zirconium oxide thin film
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Date
2012
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Abstract
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Keywords
Pulsed Laser Deposition (PLD), zirconium oxide, thin film characterization, Raman Spectroscopy, X-ray Photo-electron Spectroscopy (XPS)
Source
Materials Science Forum, 2012. Vol. 710: pp. 757-761