A possible explanation of the anomalous emissive probe behavior in a reactive RF plasma
dc.contributor.author | Kar, R. | |
dc.contributor.author | Barve, S. A. | |
dc.contributor.author | Chopade, S. S. | |
dc.contributor.author | Das, A. K. | |
dc.contributor.author | Patil, D. S. | |
dc.date.accessioned | 2013-06-18T06:10:02Z | |
dc.date.available | 2013-06-18T06:10:02Z | |
dc.date.issued | 2012 | |
dc.description.division | L&PTD | en |
dc.format.extent | 4461 bytes | |
dc.format.mimetype | text/html | |
dc.identifier.source | Plasma Sources Science & Technology, 2012. Vol. 21 (5): pp. 55009 | en |
dc.identifier.uri | http://hdl.handle.net/123456789/7573 | |
dc.language.iso | en | en |
dc.subject | possible explanation | en |
dc.subject | anomalous emissive probe behavior | en |
dc.subject | reactive RF plasma | en |
dc.subject | diamond-like carbon | en |
dc.title | A possible explanation of the anomalous emissive probe behavior in a reactive RF plasma | en |
dc.type | Article | en |