A possible explanation of the anomalous emissive probe behavior in a reactive RF plasma

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Date

2012

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Abstract

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Keywords

possible explanation, anomalous emissive probe behavior, reactive RF plasma, diamond-like carbon

Source

Plasma Sources Science & Technology, 2012. Vol. 21 (5): pp. 55009

URI

http://hdl.handle.net/123456789/7573

Collections

2012