Investigation of sputtering target re-deposits by Optical Coherence Tomography and grazing incident X-ray diffraction

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dc.contributor.authorHaque, S. M.
dc.contributor.authorDe, R.
dc.contributor.authorShinde, D. D.
dc.contributor.authorPrathap, C.
dc.contributor.authorMisal, J. S.
dc.contributor.authorRao, K. D.
dc.date.accessioned2022-07-07T06:34:50Z
dc.date.available2022-07-07T06:34:50Z
dc.date.issued2020
dc.description.divisionA&MPDen
dc.format.extent4507 bytes
dc.format.mimetypetext/html
dc.identifier.sourceThin Solid Films, 2020. Vol. 695: Article no. 137757en
dc.identifier.urihttp://hdl.handle.net/123456789/24785
dc.language.isoenen
dc.subjectSputtering targetsen
dc.subjectRe-deposition, Nodules, Optical coherence tomographyen
dc.subjectCrystallographic structureen
dc.subjectGrazing-incidence X-ray diffractionen
dc.subjectThin filmsen
dc.titleInvestigation of sputtering target re-deposits by Optical Coherence Tomography and grazing incident X-ray diffractionen
dc.typeArticleen

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