Investigation of sputtering target re-deposits by Optical Coherence Tomography and grazing incident X-ray diffraction

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Date

2020

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Abstract

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Keywords

Sputtering targets, Re-deposition, Nodules, Optical coherence tomography, Crystallographic structure, Grazing-incidence X-ray diffraction, Thin films

Source

Thin Solid Films, 2020. Vol. 695: Article no. 137757

URI

http://hdl.handle.net/123456789/24785

Collections

2020