Langmuir Probe Diagnostics of Inductively Coupled Plasma Generated Using Flat Spiral Antenna

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dc.contributor.authorKarar, P.
dc.contributor.authorGourav Kumar
dc.contributor.authorKar, R.
dc.contributor.authorKewlani, H. M.
dc.date.accessioned2022-03-28T11:09:39Z
dc.date.available2022-03-28T11:09:39Z
dc.date.issued2021
dc.description.divisionL&PSPS;IADDen
dc.format.extent4361 bytes
dc.format.mimetypetext/html
dc.identifier.sourceIEEE Transactions on Plasma Science, 2021. Vol. 49 (2): pp. 615-623en
dc.identifier.urihttp://hdl.handle.net/123456789/24282
dc.language.isoenen
dc.subjectElectron energy probability function (EEPF)en
dc.subjectinductively coupled plasma (ICP) systemen
dc.subjectplasma diagnosticsen
dc.subjectradio frequency (RF) compensated Langmuir probe (CLP)en
dc.titleLangmuir Probe Diagnostics of Inductively Coupled Plasma Generated Using Flat Spiral Antennaen
dc.typeArticleen

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