Langmuir Probe Diagnostics of Inductively Coupled Plasma Generated Using Flat Spiral Antenna
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Date
2021
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Keywords
Electron energy probability function (EEPF), inductively coupled plasma (ICP) system, plasma diagnostics, radio frequency (RF) compensated Langmuir probe (CLP)
Source
IEEE Transactions on Plasma Science, 2021. Vol. 49 (2): pp. 615-623