Development of rf plasma sputtered Al2O3-TiO2 multilayer broad band antireflecting coatings and its correlation with plasma parameters
No Thumbnail Available
Click here to download
Date
2012
Journal Title
Journal ISSN
Volume Title
Publisher
Abstract
Description
Keywords
Al2O3, TiO2, X-ray photoemission spectroscopy (XPS), PL, Optical properties, OES
Source
Applied Surface Science, 2012. Vol. 258: pp. 2275-2282