Reactive electron beam evaporation of gadolinium oxide optical thin films for ultraviolet and deep ultraviolet laser wavelengths

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Date

2003

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Abstract

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Keywords

Multilayers, Optical properties, Atomic force microscopy, Optical coating, Surface morphology, Ellipsometry, Gadolinium oxide, Microstructural properties, Viscoelastic property, Force modulation, E-beam evaporation

Source

Thin Solid Films, 2003. Vol. 440 (42767): pp. 155-168

URI

http://hdl.handle.net/123456789/23335

Collections

2003