Ion assisted near-complete filling of high aspect ratio trenches for 3-D neutron detectors

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dc.contributor.authorGourav Kumar
dc.contributor.authorKarar, P.
dc.contributor.authorSingh, A.
dc.contributor.authorTopkar, A.
dc.date.accessioned2022-01-27T09:57:33Z
dc.date.available2022-01-27T09:57:33Z
dc.date.issued2021
dc.description.divisionEDen
dc.format.extent4208 bytes
dc.format.mimetypetext/html
dc.identifier.sourceThin Solid Films, 2021. Vol. 720: Article no. 138521en
dc.identifier.urihttp://hdl.handle.net/123456789/23930
dc.language.isoenen
dc.subjectBoron carbideen
dc.subjectPlasma enhanced chemical vapor depositionen
dc.subjectOrtho- carboraneen
dc.subjectNeutron detectoren
dc.titleIon assisted near-complete filling of high aspect ratio trenches for 3-D neutron detectorsen
dc.typeArticleen

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