Ion assisted near-complete filling of high aspect ratio trenches for 3-D neutron detectors

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Date

2021

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Volume Title

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Abstract

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Keywords

Boron carbide, Plasma enhanced chemical vapor deposition, Ortho- carborane, Neutron detector

Source

Thin Solid Films, 2021. Vol. 720: Article no. 138521

URI

http://hdl.handle.net/123456789/23930

Collections

2021