X-ray reflectivity studies on DLC films deposited by microwave ECR CVD: Effect of substrate bias

dc.contributor.authorSingh, S. B.
dc.contributor.authorPoswal, A. K.
dc.contributor.authorPandey, M.
dc.contributor.authorTokas, R. B.
dc.contributor.authorChand, N.
dc.contributor.authorDhara, S.
dc.contributor.authorSundaravel, B.
dc.contributor.authorNair, K. G. M.
dc.contributor.authorSahoo, N. K.
dc.contributor.authorPatil, D. S.
dc.date.accessioned2010-08-20T08:43:25Z
dc.date.available2010-08-20T08:43:25Z
dc.date.issued2009
dc.format.extent4212 bytes
dc.format.mimetypetext/html
dc.identifier.urihttp://hdl.handle.net/123456789/3664
dc.language.isoenen
dc.subjectElectron cyclotron resonance (ECR) plasmasen
dc.subjectRaman scattering spectroscopyen
dc.subjectX: Diamond like carbonen
dc.subjectX-ray reflectivityen
dc.titleX-ray reflectivity studies on DLC films deposited by microwave ECR CVD: Effect of substrate biasen
dc.typeArticleen

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