X-ray reflectivity studies on DLC films deposited by microwave ECR CVD: Effect of substrate bias
dc.contributor.author | Singh, S. B. | |
dc.contributor.author | Poswal, A. K. | |
dc.contributor.author | Pandey, M. | |
dc.contributor.author | Tokas, R. B. | |
dc.contributor.author | Chand, N. | |
dc.contributor.author | Dhara, S. | |
dc.contributor.author | Sundaravel, B. | |
dc.contributor.author | Nair, K. G. M. | |
dc.contributor.author | Sahoo, N. K. | |
dc.contributor.author | Patil, D. S. | |
dc.date.accessioned | 2010-08-20T08:43:25Z | |
dc.date.available | 2010-08-20T08:43:25Z | |
dc.date.issued | 2009 | |
dc.format.extent | 4212 bytes | |
dc.format.mimetype | text/html | |
dc.identifier.uri | http://hdl.handle.net/123456789/3664 | |
dc.language.iso | en | en |
dc.subject | Electron cyclotron resonance (ECR) plasmas | en |
dc.subject | Raman scattering spectroscopy | en |
dc.subject | X: Diamond like carbon | en |
dc.subject | X-ray reflectivity | en |
dc.title | X-ray reflectivity studies on DLC films deposited by microwave ECR CVD: Effect of substrate bias | en |
dc.type | Article | en |