X-ray reflectivity studies on DLC films deposited by microwave ECR CVD: Effect of substrate bias

No Thumbnail Available

Click here to download

Date

2009

Journal Title

Journal ISSN

Volume Title

Publisher

Abstract

Description

Keywords

Electron cyclotron resonance (ECR) plasmas, Raman scattering spectroscopy, X: Diamond like carbon, X-ray reflectivity

Source

Collections