Enhanced nucleation and post-growth investigations on HFCVD diamond films grown on silicon single crystals pretreated with Zr:diamond mixed slurry
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Date
2004
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Keywords
Substrate pretreatment, Zr:diamond mixed slurry, Nucleation, HFCVD, Diamond films
Source
Applied Surface Science, 2004. Vol. 229 (42826): pp. 254-262