Enhanced nucleation and post-growth investigations on HFCVD diamond films grown on silicon single crystals pretreated with Zr:diamond mixed slurry

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Date

2004

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Keywords

Substrate pretreatment, Zr:diamond mixed slurry, Nucleation, HFCVD, Diamond films

Source

Applied Surface Science, 2004. Vol. 229 (42826): pp. 254-262

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