Design and development of an in-line sputtering system and process development of thin film multilayer neutron supermirrors

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dc.contributor.authorBiswas, A.
dc.contributor.authorSampathkumar, R.
dc.contributor.authorAjaya Kumar
dc.contributor.authorBhattacharyya, D.
dc.contributor.authorSahoo, N. K.
dc.contributor.authorLagoo, K. D.
dc.contributor.authorVeerapur, R. D.
dc.contributor.authorPadmanabhan, M.
dc.contributor.authorPuri, R. K.
dc.contributor.authorBhattacharya, D.
dc.contributor.authorSingh, S.
dc.contributor.authorBasu, S.
dc.date.accessioned2015-06-10T10:04:48Z
dc.date.available2015-06-10T10:04:48Z
dc.date.issued2014
dc.description.divisionA&MPD;DRHR;SSPDen
dc.format.extent4372 bytes
dc.format.mimetypetext/html
dc.identifier.sourceReview of Scientific Instruments, 2014. Vol. 85 (12): pp. 123103.1-123103.12en
dc.identifier.urihttp://hdl.handle.net/123456789/11187
dc.language.isoenen
dc.subjectin-line sputtering systemen
dc.subjectprocess developmenten
dc.subjectthin film multilayer neutron supermirrorsen
dc.subjectDesign and developmenten
dc.titleDesign and development of an in-line sputtering system and process development of thin film multilayer neutron supermirrorsen
dc.typeArticleen

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