Design and development of an in-line sputtering system and process development of thin film multilayer neutron supermirrors

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Date

2014

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Abstract

Description

Keywords

in-line sputtering system, process development, thin film multilayer neutron supermirrors, Design and development

Source

Review of Scientific Instruments, 2014. Vol. 85 (12): pp. 123103.1-123103.12

URI

http://hdl.handle.net/123456789/11187

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2014