Influence of ion-to-atom ratio on the microstructure of evaporated molybdenum thin films grown using low energy argon ions

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Date

2014

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Keywords

ion-to-atom ratio, microstructure, molybdenum thin films, low energy argon ions

Source

Journal of Vacuum Science & Technology-A, 2014. Vol. 32 (2): Article no. 21509

URI

http://hdl.handle.net/123456789/10423

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2014