EXAFS study on yttrium oxide thin films deposited by RF plasma enhanced MOCVD under the influence of varying RF self-bias
dc.contributor.author | Chopade, S. S. | |
dc.contributor.author | Nayak, C. | |
dc.contributor.author | Bhattacharyya, D. | |
dc.contributor.author | Jha, S. N. | |
dc.contributor.author | Tokas, R. B. | |
dc.contributor.author | Sahoo, N. K. | |
dc.contributor.author | Patil, D. S. | |
dc.date.accessioned | 2015-01-09T07:23:53Z | |
dc.date.available | 2015-01-09T07:23:53Z | |
dc.date.issued | 2014 | |
dc.description.division | L&PTD;A&MPD | en |
dc.format.extent | 5159 bytes | |
dc.format.mimetype | text/html | |
dc.identifier.source | Applied Surface Science, 2014. Vol. 314: pp. 400-407 | en |
dc.identifier.uri | http://hdl.handle.net/123456789/10200 | |
dc.language.iso | en | en |
dc.subject | EXAFS | en |
dc.subject | Thin films | en |
dc.subject | Yttrium oxide | en |
dc.subject | Plasma CVD | en |
dc.subject | Atomic force microscopy | en |
dc.title | EXAFS study on yttrium oxide thin films deposited by RF plasma enhanced MOCVD under the influence of varying RF self-bias | en |
dc.type | Article | en |