Design and performance of differential pumping system of coating unit

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dc.contributor.authorKarmakar, P.
dc.contributor.authorMaiti, N.
dc.contributor.authorBapat, A. V.
dc.date.accessioned2010-06-03T04:50:01Z
dc.date.available2010-06-03T04:50:01Z
dc.date.issued2008
dc.format.extent4544 bytes
dc.format.mimetypetext/html
dc.identifier.urihttp://hdl.handle.net/123456789/2463
dc.language.isoenen
dc.subjectDifferential Pumping Systemen
dc.subjectsubstrate chamberen
dc.subjectgun chamberen
dc.subjectelectron beamsen
dc.subjectup-stream pressure controlleren
dc.titleDesign and performance of differential pumping system of coating uniten
dc.typeArticleen

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