Design and performance of differential pumping system of coating unit

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Date

2008

Authors

Karmakar, P.
Maiti, N.
Bapat, A. V.

Journal Title

Journal ISSN

Volume Title

Publisher

Abstract

Description

Keywords

Differential Pumping System, substrate chamber, gun chamber, electron beams, up-stream pressure controller

Source

URI

http://hdl.handle.net/123456789/2463

Collections

2008