High resolution TOF - SIMS depth profiling of nano-film multilayers

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dc.contributor.authorBhushan, K. G.
dc.contributor.authorMukundhan, R.
dc.contributor.authorGupta, S. K.
dc.date.accessioned2014-03-28T10:04:03Z
dc.date.available2014-03-28T10:04:03Z
dc.date.issued2013
dc.description.divisionTPDen
dc.format.extent3740 bytes
dc.format.mimetypetext/html
dc.identifier.sourceAIP Conference Proceedings, 2013. Vol. 1512 (1): pp. 680-681en
dc.identifier.urihttp://hdl.handle.net/123456789/9001
dc.language.isoenen
dc.subjectHigh resolution TOF - SIMS depth profilingen
dc.subjectnano-film multilayersen
dc.subjectthin film W-C-W multilayer structureen
dc.subjectroughness model calculationsen
dc.titleHigh resolution TOF - SIMS depth profiling of nano-film multilayersen
dc.typeArticleen

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