High resolution TOF - SIMS depth profiling of nano-film multilayers

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Date

2013

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Description

Keywords

High resolution TOF - SIMS depth profiling, nano-film multilayers, thin film W-C-W multilayer structure, roughness model calculations

Source

AIP Conference Proceedings, 2013. Vol. 1512 (1): pp. 680-681

URI

http://hdl.handle.net/123456789/9001

Collections

2013