Effect of substrate temperature and nitrogen concentration during sputtering on corrosion behaviour of AlN coatings

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dc.contributor.authorChoudhary, R. K.
dc.contributor.authorMishra, P.
dc.contributor.authorRoychowdhury, S.
dc.contributor.authorKain, V.
dc.date.accessioned2018-03-21T08:22:11Z
dc.date.available2018-03-21T08:22:11Z
dc.date.issued2016
dc.description.divisionMP&CEDen
dc.format.extent4132 bytes
dc.format.mimetypetext/html
dc.identifier.sourceTransactions of the Institute of Metal Finishing, 2016. Vol. 94 (5): pp. 250-253en
dc.identifier.urihttp://hdl.handle.net/123456789/15854
dc.language.isoenen
dc.subjectAluminium nitrideen
dc.subjectCoatingen
dc.subjectSputteringen
dc.subjectCorrosionen
dc.titleEffect of substrate temperature and nitrogen concentration during sputtering on corrosion behaviour of AlN coatingsen
dc.typeArticleen

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