BARC/PUB/2016/1343

 
 

Effect of substrate temperature and nitrogen concentration during sputtering on corrosion behaviour of AlN coatings

 
     
 
Author(s)

Choudhary, R. K.; Mishra, P.; Roychowdhury, S.; Kain, V.
(MP&CED)

Source

Transactions of the Institute of Metal Finishing, 2016. Vol. 94 (5): pp. 250-253

ABSTRACT

Aluminium nitride coatings were formed on stainless steel substrate by DC-reactive balanced magnetron sputtering at various nitrogen concentrations in the sputtering gas mixture, and different substrate temperatures. The electrochemical corrosion behaviour of the coatings obtained was studied in 0.5 M H2SO4. Continuous improvement in corrosion resistance of the coatings was observed with increasing coating deposition temperature up to 500 °C. The corrosion potential shifted from −0.66 VSCE at 100 °C to −0.33 VSCE at 500 °C. Accordingly, the corrosion current density decreased significantly with increase in the deposition temperature. However, no major difference in corrosion behaviour could be noticed for the coatings formed at various nitrogen concentrations.

 
 
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