SiOx containing diamond like carbon coatings: Effect of substrate bias during deposition

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Date

2017

Authors

Journal Title

Journal ISSN

Volume Title

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Abstract

Description

Keywords

Diamond like carbon, DLC-SiOx, RF CVD, Thin films

Source

Diamond & Related Materials, 2017. Vol. 71: pp. 63-72

URI

http://hdl.handle.net/123456789/20590

Collections

2017