Surface characterization of magnesium fluoride thin films prepared by a fluorine trapping based non-reactive sputtering technique

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Date

2016

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Abstract

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Keywords

MgF2 thin films, RF magnetron sputtering, Ellipsometry, Atomic force microscopy, Surface correlation functions, Roughness evaluation

Source

Vacuum, 2016. Vol. 134: pp. 110-119

URI

http://hdl.handle.net/123456789/16076

Collections

2016