Study of Low Energy (50 keV) Silicon Negative ion Implantation in GaAs
No Thumbnail Available
Click here to download
Date
2020
Authors
Journal Title
Journal ISSN
Volume Title
Publisher
Abstract
Description
Keywords
Silicon negative ion implantation, SEM, EDX, AFM, XRD
Source
Materials Today: Proceedings, 2020. Vol. 23: pp. 309-316