The effect of pulse width on asymmetric bipolar pulse DC sputtered tantalum pentoxide thin films

Haque, S. M.Tripathi, S.De, R.Misal, J. S.Shinde, D. D.Rao, K. D.Sahoo, N. K.2020-09-042020-09-042017AIP Conference Proceedings, 2017. Vol. 1832: Article no. 080047http://hdl.handle.net/123456789/205364239 bytestext/htmlenTa2O5sputteringellipsometrypulse DCThe effect of pulse width on asymmetric bipolar pulse DC sputtered tantalum pentoxide thin filmsArticle