Study of reactive electron beam deposited tantalum penta oxide thin films with spectroscopic ellipsometry and atomic force microscopy

Tokas, R. B.Jena, S.Prathap, C.Thakur, S.Divakar Rao, K.Udupa, D. V.2024-09-182024-09-182023Applied Surface Science Advances, 2023. Vol. 18: Article no. 100480http://hdl.handle.net/123456789/274424943 bytestext/htmlenTantalum penta oxide thin filmsElectron beam depositionSpectroscopic ellipsometryAtomic force microscopyGrazing incidence X-ray reflectivityStudy of reactive electron beam deposited tantalum penta oxide thin films with spectroscopic ellipsometry and atomic force microscopyArticle