Maiti, N.Karmakar, P.Barve, U. D.Bapat, A. V.2010-06-112010-06-112008http://hdl.handle.net/123456789/25644228 bytestext/htmlenEvaporation Systemelectron beam physical vapor depositionreactive evaporationsemiconductorsAn evaporation system for film deposition using electron beam sourcesArticle