Diagnostics of downstream microwave electron cyclotron resonance (ECR) plasma

Kar, R.Singh, S. B.Tiwari, N.Barve, D. N.Barve, S. A.Chand, N.Patil, D. S.2011-06-132011-06-132010Journal of Physics-Conference Series, 2010. Vol. 208: pp. 012137 doi: 10.1088/1742-6596/208/1/012137http://hdl.handle.net/123456789/48304422 bytestext/htmlenDiagnosticsdownstream microwaveelectron cyclotron resonance (ECR) plasmachemical vapour depositionDiagnostics of downstream microwave electron cyclotron resonance (ECR) plasmaArticle