Singh, K.Patnaik P.Bhaisare D. K.JagannathKrishnamurthy N.Suri A. K.2012-09-062012-09-062011Journal of Metallurgy and Materials Science, 2011. Vol. 53 (3): pp. 261-268http://hdl.handle.net/123456789/66744823 bytestext/htmlenMagnetron sputteringCoatingSticking coefficientTitaniumAluminiumMeasurement of relative sticking coefficient of nitrogen on Al/Ti in a magnetron sputtering systemArticle