Optical and mechanical properties of diamond like carbon films deposited by microwave ECR plasma CVD

Singh, S. B.Pandey, M.Chand, N.Biswas, A.Bhattacharya, D.Dash, S.Tyagi, A. K.Dey, R. M.Kulkarni, S. K.Patil, D. S.2010-07-142010-07-142008http://hdl.handle.net/123456789/29524240 bytestext/htmlenDiamond like carbonchemical vapour depositionmechanical propertiesRaman spectroscopyOptical and mechanical properties of diamond like carbon films deposited by microwave ECR plasma CVDArticle