Local crystal structure and mechanical properties of sputtered Ti-doped AlN thin films

Panda, P.Krishna, N. G.Rajput, P.2019-09-062019-09-062018Physical Chemistry Chemical Physics, 2018. Vol. 20: pp. 29817-29825http://hdl.handle.net/123456789/192684701 bytestext/htmlenLocal crystal structurenano-mechanical propertysputtered Ti-doped AlN thin filmsX-ray absorption spectroscopy (XAS)Local crystal structure and mechanical properties of sputtered Ti-doped AlN thin filmsArticle