Investigation of sputtering target re-deposits by Optical Coherence Tomography and grazing incident X-ray diffraction

Haque, S. M.De, R.Shinde, D. D.Prathap, C.Misal, J. S.Rao, K. D.2022-07-072022-07-072020Thin Solid Films, 2020. Vol. 695: Article no. 137757http://hdl.handle.net/123456789/247854507 bytestext/htmlenSputtering targetsRe-deposition, Nodules, Optical coherence tomographyCrystallographic structureGrazing-incidence X-ray diffractionThin ﬁlmsInvestigation of sputtering target re-deposits by Optical Coherence Tomography and grazing incident X-ray diffractionArticle