Development of surface barrier detectors of low leakage current employing argon cold plasma assisted silicon surface cleaning prior to detector fabrication

Ray, A.Das, T. N.Betty, C. A.Chandrasekhar Rao, T. V.2019-08-202019-08-202018Journal of Instrumentation (JINST), 2018. Vol. 13: Article no. P09019http://hdl.handle.net/123456789/191034385 bytestext/htmlenHeavy-ion detectorsSolid state detectorsDevelopment of surface barrier detectors of low leakage current employing argon cold plasma assisted silicon surface cleaning prior to detector fabricationArticle