Effect of self-bias on the elemental composition and neutron absorption of boron carbide films deposited by RF plasma enhanced CVD

Bute, A.Jagannath, K. R.Chopade, S. S.Desai, S. S.Deo, M. N.Rao, P.Chand, N.Singh, K.Sinha, S.2018-03-222018-03-222016Materials Chemistry and Physics, 2016. Vol. 182: pp. 62-71http://hdl.handle.net/123456789/158824636 bytestext/htmlenCarbidesPlasma-assisted CVDXPSFTIREffect of self-bias on the elemental composition and neutron absorption of boron carbide films deposited by RF plasma enhanced CVDArticle