Effect of Y2O3 doping on HfO2 thin film prepared by pulsed laser deposition (PLD): XPS studies

Nand, M.Rajput, P.Choudhary, R. J.Jha, S. N.2020-03-062020-03-062019AIP Conference Proceedings, 2019. Vol. 2115: Article no. 030330http://hdl.handle.net/123456789/203793959 bytestext/htmlenY2O3 doping effectHfO2 thin filmpulsed laser deposition (PLD)XPS studyEffect of Y2O3 doping on HfO2 thin film prepared by pulsed laser deposition (PLD): XPS studiesArticle