Langmuir Probe Diagnostics of Inductively Coupled Plasma Generated Using Flat Spiral Antenna

Karar, P.Gourav KumarKar, R.Kewlani, H. M.2022-03-282022-03-282021IEEE Transactions on Plasma Science, 2021. Vol. 49 (2): pp. 615-623http://hdl.handle.net/123456789/242824361 bytestext/htmlenElectron energy probability function (EEPF)inductively coupled plasma (ICP) systemplasma diagnosticsradio frequency (RF) compensated Langmuir probe (CLP)Langmuir Probe Diagnostics of Inductively Coupled Plasma Generated Using Flat Spiral AntennaArticle