Development of rf plasma sputtered Al2O3-TiO2 multilayer broad band antireflecting coatings and its correlation with plasma parameters

Laha, P.Panda, A. B.Mahapatra, S. K.Barhai, P. K.Das, A. K.Banerjee, I.2012-07-052012-07-052012Applied Surface Science, 2012. Vol. 258: pp. 2275-2282http://hdl.handle.net/123456789/62634697 bytestext/htmlenAl2O3TiO2X-ray photoemission spectroscopy (XPS)PLOptical propertiesOESDevelopment of rf plasma sputtered Al2O3-TiO2 multilayer broad band antireflecting coatings and its correlation with plasma parametersArticle