Dey, R. M.Singh, S. B.Biswas, A.Tokas, R. B.Chand, N.Venkateshwaran, S.Bhattacharya, D.Sahoo, N. K.Gosavi, S. W.Kulkarni, S. K.Patil, D. S.2010-04-162010-04-162008http://hdl.handle.net/123456789/22244365 bytestext/htmlenDiamond like carbonElectron cyclotron resonanceAtomic force microscopyX-ray photoelectron spectroscopySpectroscopic ellipsometryContact angleRoughnessSubstrate bias effects during diamond like carbon film deposition by microwave ECR plasma CVDArticle